The silicon tetrachloride stainless container is a high-purity container made of 316L stainless steel. It comes in three sizes: 45L, 250L, and 900L, which can hold 45kg,300kg, and 1000kg products respectively. Two available valves are 1/2" and 1/4" VCR interface valve. Different packaging and interfaces can be provided according to user requirements.
Technical data
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Gas name
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Silicon tetrachloride（SiCl4）
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Ingredient or Impurity Names
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Product Specifications
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Purity
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≥99.9999%
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Resistivity
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≥500 ohm.cm
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Other chlorosilanes
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<1ppm/w
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Carbon(C)
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<0.2ppb/w
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Donor(As+P)
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≤0.08ppb/w
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Boron(B)
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≤0.1ppb/w
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Iron(Fe)
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<2ppb/w
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Nickel(Ni)
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≤2ppb/w
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Chromium(Cr)
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≤1ppb/w
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