The container is made of carbon steel cylider with its inner wall mirror polished and passivated. There are two specifications available in capacity: 10L and 47L. And there are 3 kinds of valves available: CGA660/CGA350/CGA634. Different volume containers are packaged with a filling coefficient of 0.25 kg/L. Customized packaging and interfaces can also be provided.
Technical data
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Material grade methylsilane
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Gas name
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Methylsilane(CH3SiH3)
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Ingredients/Impurity Names
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Product Specifications
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Methylsilane
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≥99.5 %
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Non condensable gas impurities
(N2，O2+Ar，CO2，CH4)
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≤0.2%
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Silane
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≤0.2%
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Chlorosilane
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≤0.1%
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Electrical grade methylsilane
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Gas name
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Methylsilane(CH3SiH3)
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Ingredients/Impurity Names
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Product Specifications
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SiH3CH3
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>99.98%(Excluding other methylsilanes)
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N2
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≤10ppm/v
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Ar+O2
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≤2ppm/v
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CO2
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≤10ppm/v
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CH4
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≤50ppm/v
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SiH4
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≤50ppm/v
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Other Methylsilanes
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≤50ppm/v
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Chlorosilanes
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≤50ppm/v
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