Product Description:
The packaging for dichlorodihydroxysilane is made of 316L stainless steel. There are two size available,10L and 47L, which can hold 10KG and 40KG of product respectively. The valve of CGA678/CGA636 is available. Different packaging and interfaces can also be provided according to the specific requirements of the user.
Technical Data Sheet
Gas Name
|
Dichlorosilane(SiH2Cl2)
|
Ingredient or Impurity Names
|
Product specifications
|
Purity
|
≥99.9%
|
Resistivity
|
≥400 ohm.cm
|
Other chlorosilanes
|
≤1000 ppm/w
|
Carbon(C)
|
≤0.03 ppm/w
|
Donor(As,P)
|
≤0.08 ppb/w
|
Boron(B)
|
≤0.01 ppb/w
|
Iron(Fe)
|
<2 ppb/w
|
Nickel(Ni)
|
≤0.2 ppb/w
|
Chromium(Cr)
|
≤2 ppb/w
|