The container is made of carbon steel cylider with its inner wall mirror polished and passivated. There are two specifications available in capacity: 10L and 47L, which can hold 3KG and 15KG product respectively. And there are 3 kinds of valves available: CGA660/CGA350/CGA634. Different packaging and interfaces can also be provided according to customer needs.
Technical data
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Material grade trimethylsilane
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Ingredients/Impurity Names
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Product Specifications
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Trimethylsilane
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≥99.5 %
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Non-condensable gas impurities(N2, O2+Ar，CO2, CH4)
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≤1.0 %
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Silane
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≤0.5 %
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Chlorosilane
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≤0.5 %
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Electrical grade trimethylsilane
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Ingredients/Impurity Names
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Product Specifications
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( CH3)3SiH
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≥99.99% (excluding other methyl silanes)
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N2
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≤10 ppm/v
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O2+Ar
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≤2ppm/v
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CO2
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≤5ppm/v
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CH4
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≤5ppm/v
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SiH4
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≤5ppm/v
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Other Methylsilanes
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≤300 ppm/v
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Chlorosilanes
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≤10 ppm/v
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