Product Description:
The packaging for dichlorodihydroxysilane is made of 316L stainless steel. There are two size available,10L and 47L, which can hold 10KG and 40KG of product respectively. The valve of CGA678/CGA636 is available. Different packaging and interfaces can also be provided according to the specific requirements of the user.
Technical Data Sheet
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Gas Name
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Dichlorosilane(SiH2Cl2)
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|
Ingredient or Impurity Names
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Product specifications
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Purity
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≥99.9%
|
|
Resistivity
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≥400 ohm.cm
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|
Other chlorosilanes
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≤1000 ppm/w
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Carbon（C）
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≤0.03 ppm/w
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Donor（As，P）
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≤0.08 ppb/w
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Boron（B）
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≤0.01 ppb/w
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Iron(Fe)
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＜2 ppb/w
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Nickel（Ni）
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≤0.2 ppb/w
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Chromium（Cr）
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≤2 ppb/w
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